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Draft Document – Testing of materials for semiconductor technology – Determination of traces of elements in liquids – Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH<(Index)4>F) and in etching mixtures of high-purity ammonium fluoride solution containing hydroflu standard by Deutsches Institut Fur Normung E.V. (German National Standard), 11/01/2012
