1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.
1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.
Product Details
Published:
07/01/2012
Number of Pages:
27
File Size:
1 file , 1.1 MB
Note:
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