1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
Product Details
Published:
10/01/2015
Number of Pages:
4
File Size:
1 file , 91 KB
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