IEC 62047-1 Ed. 2.0 b – Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
Product Details
Edition:
2.0
Published:
01/06/2016
Number of Pages:
66
File Size:
1 file , 790 KB
Note:
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